Emerging memory technology V-NAND is one of the most challenging in terms of metrology and failure analysis. Different materials and high structures of V-NAND required special techniques to ensure fastest turnaround time for sample preparation. Adaptive Ion Milling utilized in Xact200 system provides sufficient solution for delayering and cross-section of V-NAND structures in delivering wide flat areas for analysis with high accuracy end-point detection and unsurpassed quality of surface.