ADVANCED SAMPLE PREPARATION METHODS
- Delayering and slope milling
- Cross-section of small and big objects
- Cross-section of 3D integrated structures and TSV
- Cross-section of MEMS devices
- SCM and SSRM preparation
- Dedicated preparations for special requirements
Equipment: Xact200 SELA’s Twin Beam AIM system performs advanced sample preparation for the PFA and characterization.
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