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SELA Xact
SELA, a provider of cutting-edge engineering and failure analysis tools for the semiconductor industry, is introducing the Xact, the first TEM sample preparation system using the disruptive new AIMTM

technology, delivering significantly reduced turnaround times and enhanced productivity. AIMTM, SELA's unique Adaptive Ion Milling

technology, is superior to the traditional Focused Ion Beam technology (FIB). AIMTM can reduce sample widths to below 50

nanometers over a large area with high precision, artifact free (wedge-like) quality, and higher throughput.

SELA’s newest system, Xact, introduces a twin-beam combination uniquely configured for more precise end-point detection and artifact-free sample clarity. The Xact joins SELA's SEM-oriented Microcleaving solution to set the standard for high-quality, automated engineering and failure analysis EM sample preparation.

The Xact and SELA’s latest pre-preparation standalone system – the EM3 – offers a comprehensive and cost effective solution for TEM and STEM sample preparation. The division of functions, pre-prep and final prep, between two standalone and optimized tools enables parallel processing for the highest total productivity. It also results in a low cost per sample and, more importantly, a low cost per successful sample given the success rate of preparation resulting from enhanced quality, large area and end-point detection.

Xact White Paper
 
 
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