A dedicated, automated, timesaving and user-friendly system that enables a total solution for TEM/STEM and SEM sample preparation for both cross section and plan view in a wide range of applications. Featuring a cryo-cooled, dry sawing process, the EM3 system prepares specimens of either crystalline or amorphous materials. The output sample is mounted onto a compatible stub or standard TEM grid that allows rework.

Features:

• Flexible cryo-cooled cry sawing process
• TEM side view, TEM plan view, SEM sample preparation
• Target as near as 0.5mm to sample edge
• Side view multi-target process without stub
• 300mm stage allowing full wafer inspection and marking
• Full wafer navigation capability
• High magnification optics (7500x)
• Quick process with pattern recognition software (PRS)
• Versatile encapsulation capability
• Xact dedicated sample preparation

 

Benefits:

• Applicable for site-specific and general area
• Enables multiple reworks of TEM specimen
• Interfaces with broad and focused ion milling
• Increases overall throughput
• Improves yield analysis
• Improves characterization
• Low cost of ownership